Units
The following units are generally used in the axis parameter lists:
Size | Unit |
Position linear | 0.1 µm |
Position rotary | 0.1 x 10 10-3° |
Velocity | 1 µm / s or 10-3°/s |
Acceleration | 1 mm/s2 |
Time | µs |
Position controller gain (Kv) | 0.01* 1/s |
The following units are generally used in the axis parameter lists:
Size | Unit |
Position linear | 0.1 µm |
Position rotary | 0.1 x 10 10-3° |
Velocity | 1 µm / s or 10-3°/s |
Acceleration | 1 mm/s2 |
Time | µs |
Position controller gain (Kv) | 0.01* 1/s |