REAL64 input parameters for surface feed rate (P-CHAN-00390)

P-CHAN-00390

REAL64 input parameters for surface feed rate

Description

A total of four REAL64 input parameters can be defined for surface feed rate.

Caution:
f[0]=<gap_value> in [0.1 µm]
This entry is default.

Parameter

geo_feed_adapt.param.f[i] where i = 0…3

Data type

REAL64

Data range

MIN(REAL64) ≤ f[i] ≤ MAX(REAL64)

Dimension

----

Default value

0.0

Remarks

Available as of V3.1.3108