Compensation value for deceleration in negative motion direction (P-COMP-00090)
| P-COMP-00090 | Compensation value for deceleration in negative motion direction | |
| Description | Compensation value at position i for deceleration in negative motion direction. | |
| Parameter | kw.crosstalk.position[i].correction_decelerate_dir_neg | |
| Data type | SGN64 | |
| Data range | MIN(SGN64) ≤ P-COMP-00090 < MAX(SGN64) | |
| Axis types | T | |
| Dimension | T: [0.1 µm] | R, S: - | 
| Default value | 0 | |
| Remarks | Parameter available as of V3.1.3081.2 and V3.1.3108.4 This parameter is only active if P-COMP-00084 is activated. | |