Interpolation point of the master axis (P-COMP-00006)

P-COMP-00006

Interpolation point of the master axis

Description

This parameter determines the interpolation points of the master axis on which the slave axis has to be corrected.

Parameter

kw.crosscomp.table[i].setpoint

Data type

SGN32

Data range

MIN(SGN32) ≤ setpoint < MAX(SGN32)

Axis types

T, R, S

Dimension

T: 0.1 µm or increments

R,S: 0.0001° or increments

Default value

0

Remarks